Font-Size
Contrast
Blue-Filter

Highest precision in confocal chromatic displacement and thickness measurements


The confocalDT sensors product range stands for the highest precision and dynamics in confocal chromatic measurement technology. These sensors enable high-precision and fast measurements for both distance and thickness measurements of transparent objects. In addition, innovative controller and sensor technologies ensure high signal stability on all surfaces. The high-performance sensor portfolio enables the solution of a wide range of measurement tasks, e.g., in flat glass production, in measuring machines and in semiconductor machine construction.

Get in touch with us!

Models

The confocal chromatic measuring principle

Polychromatic white light is focused onto the target surface by a multi-lens optical system. The special lens arrangement splits the white light into monochromatic wavelengths by controlled chromatic aberration. To each wavelength, a specific distance is assigned by factory calibration. Only the wavelength which is exactly focused on the target is used for the measurement. An optical arrangement images the light reflected onto a light sensitive sensor element. This sensor element detects the corresponding spectral color and evaluates it. In the case of multi-peak measurements, several distance points are evaluated accordingly.

Thickness measurement for transparent materials

If the object to be measured is transparent, the light is reflected both by the surface and by the underlying surface. The spectrometer separately detects the two reflected colors. If the refractive index of the measured object (e.g. glass) is known, the distance between the two surfaces can be calculated and output.

Ideal for precise measurements in industrial applications

High-resolution measurements in the semiconductor industry
Small sensor designs for measurement in confined spaces
Characteristics

  • Distance and thickness measurements with high resolution and measuring rate
  • Ideal for automation and production monitoring
  • Virtually surface-independent, even for mirrors and glass
  • Extremely small, constant measurement spot for the smallest details
  • Nanometer resolution
  • Industrial-grade controller with ideal signal-to-noise ratio
  • Passive measuring system, ideal for applications in vacuum up to UHV
  • Reliable measurement up to 200 °C ambient temperature
Wasserzeichen-Logo von Optronic
konfokal-chromatische Sensoren von MICRO-EPSILON
Follow us: