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Innovative white light interferometers for industry and automation.
Innovative white light interferometers for industry and automation.
The innovative MICRO-EPSILON interferometers for absolute measurements set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution, offering a comparatively large measuring range and offset distance.
This offers the following advantages for the measurement:
Interferometers from MICRO-EPSILON work differently than laser interferometers with polychromatic white light. The integrated SLED light source uses an extended wavelength spectrum instead of a defined wavelength. The light reflected by both the reference and measuring object is received by the sensor and conducted into the controller. The reflected light interferes with each other. Detection of distances and thicknesses is possible with amplification and elimination. This means that significantly more information is available for evaluating the superposition of received wavelengths. This enable the measurement of both diffuse and reflecting surfaces. For transparent layer materials, thickness measurements can be conducted in addition to distance measurements.
